Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315709 | Method of performing maintenance on substrate processing apparatus | Takayuki Suzuki, Takahiro Murakami | 2025-05-27 |
| 12080521 | Plasma processing method | Michiko Nakaya, Taku Gohira | 2024-09-03 |
| 11920242 | Temperature control method and plasma processing apparatus | Kaho Enomoto, Hayato Sakai | 2024-03-05 |
| 11749508 | Plasma processing method | Michiko Nakaya, Taku Gohira | 2023-09-05 |
| 11688609 | Etching method and plasma processing apparatus | — | 2023-06-27 |
| 10811275 | Plasma etching method and plasma etching apparatus | Taku Gohira | 2020-10-20 |