Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920242 | Temperature control method and plasma processing apparatus | Yuya Minoura, Kaho Enomoto | 2024-03-05 |
| 11835278 | Temperature control medium processing apparatus and temperature control medium processing method | Takehiko Arita, Haruka Kaneko, Satoshi Suzuki | 2023-12-05 |
| 11817334 | Substrate processing apparatus and substrate processing method | Haruka Kaneko, Takehiko Arita | 2023-11-14 |