KE

Kaho Enomoto

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Rifu, JP: #1,311 of 2,101 inventorsTop 65%
Overall (All Time): #2,481,607 of 4,157,543Top 60%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11920242 Temperature control method and plasma processing apparatus Yuya Minoura, Hayato Sakai 2024-03-05