Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835278 | Temperature control medium processing apparatus and temperature control medium processing method | Hayato Sakai, Haruka Kaneko, Satoshi Suzuki | 2023-12-05 |
| 11817334 | Substrate processing apparatus and substrate processing method | Haruka Kaneko, Hayato Sakai | 2023-11-14 |
| 11692639 | Valve device | Kei Kobayashi | 2023-07-04 |
| 11404251 | Processing apparatus for processing target object | Shin Yamaguchi, Akiyoshi Mitsumori, Koichi Murakami | 2022-08-02 |
| 11237577 | Temperature control system including multiple valves and temperature control method | Kei Kobayashi | 2022-02-01 |
| 10907864 | Cooling system | — | 2021-02-02 |