Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068143 | Temperature adjustment method | Shin Yamaguchi | 2024-08-20 |
| 11869799 | Temperature adjustment system | Shin Yamaguchi | 2024-01-09 |
| 11566728 | Flexible pipe and temperature control system | Kohei Otsuki, Koji Kamata | 2023-01-31 |
| 11476095 | Electrostatic chuck and plasma processing apparatus | Shin Yamaguchi | 2022-10-18 |
| 11404251 | Processing apparatus for processing target object | Shin Yamaguchi, Takehiko Arita, Koichi Murakami | 2022-08-02 |
| 11236420 | Cleaning method | Shin Yamaguchi | 2022-02-01 |
| 11060770 | Cooling system | Shin Yamaguchi | 2021-07-13 |
| 10910200 | Plasma processing apparatus and precoating method | Yoshiyuki Kikuchi | 2021-02-02 |
| 10825660 | Electrostatic chuck and plasma processing apparatus | Shin Yamaguchi | 2020-11-03 |
| 10818480 | Method of operating electrostatic chuck of plasma processing apparatus | Shin Yamaguchi | 2020-10-27 |
| 10796889 | Processing apparatus for target object and inspection method for processing apparatus | Akira Ishikawa, Atsushi Matsuura, Shin Yamaguchi | 2020-10-06 |
| 10787950 | Heat insulating pipe system and processing system | Kohei Otsuki | 2020-09-29 |
| 10665432 | Temperature control method | Shin Yamaguchi | 2020-05-26 |