Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971373 | Methods for cyclic etching of a patterned layer | Alok Ranjan | 2021-04-06 |
| 10541146 | Method of cyclic plasma etching of organic film using sulfur-based chemistry | Alok Ranjan | 2020-01-21 |
| 10535531 | Method of cyclic plasma etching of organic film using carbon-based chemistry | Alok Ranjan | 2020-01-14 |
| 10381235 | Method of selective silicon nitride etching | Alok Ranjan, Sonam D. Sherpa | 2019-08-13 |
| 10366902 | Methods for cyclic etching of a patterned layer | Alok Ranjan | 2019-07-30 |
| 9947597 | Defectivity metrology during DSA patterning | Alok Ranjan | 2018-04-17 |
| 9666447 | Method for selectivity enhancement during dry plasma etching | Alok Ranjan | 2017-05-30 |
| 9607843 | Method for roughness improvement and selectivity enhancement during arc layer etch via adjustment of carbon-fluorine content | Alok Ranjan | 2017-03-28 |
| 9576812 | Partial etch memorization via flash addition | Elliott Franke, Akiteru Ko, Kiyohito Ito | 2017-02-21 |
| 9576816 | Method for roughness improvement and selectivity enhancement during arc layer etch using hydrogen | Alok Ranjan | 2017-02-21 |
| 9530667 | Method for roughness improvement and selectivity enhancement during arc layer etch using carbon | Alok Ranjan | 2016-12-27 |