Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11658037 | Method of atomic layer etching of oxide | Alok Ranjan | 2023-05-23 |
| 10991594 | Method for area-selective etching of silicon nitride layers for the manufacture of microelectronic workpieces | Alok Ranjan | 2021-04-27 |
| 10937662 | Method of isotropic etching of silicon oxide utilizing fluorocarbon chemistry | Alok Ranjan | 2021-03-02 |
| 10818507 | Method of etching silicon nitride layers for the manufacture of microelectronic workpieces | Alok Ranjan | 2020-10-27 |
| 10770305 | Method of atomic layer etching of oxide | Alok Ranjan | 2020-09-08 |
| 10699911 | Method of conformal etching selective to other materials | Erdinc Karakas, Alok Ranjan | 2020-06-30 |
| 10658192 | Selective oxide etching method for self-aligned multiple patterning | Alok Ranjan | 2020-05-19 |
| 10607852 | Selective nitride etching method for self-aligned multiple patterning | Alok Ranjan | 2020-03-31 |
| 10515814 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-12-24 |
| 10446407 | Method of preferential silicon nitride etching using sulfur hexafluoride | Alok Ranjan | 2019-10-15 |
| 10446405 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Alok Ranjan | 2019-10-15 |
| 10431470 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-10-01 |
| 10381235 | Method of selective silicon nitride etching | Alok Ranjan, Vinayak Rastogi | 2019-08-13 |
| 10373828 | Method of sidewall image transfer | Alok Ranjan | 2019-08-06 |
| 10312102 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-06-04 |
| 10304688 | Method of quasi-atomic layer etching of silicon nitride | Alok Ranjan | 2019-05-28 |
| 10192743 | Method of anisotropic extraction of silicon nitride mandrel for fabrication of self-aligned block structures | Alok Ranjan | 2019-01-29 |
| 9881807 | Method for atomic layer etching | Alok Ranjan, Mingmei Wang | 2018-01-30 |
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Jason Marion, Sergey Voronin, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |