Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818482 | Methods for stability monitoring and improvements to plasma sources for plasma processing | Yusuke Yoshida, Sergey Voronin, Alok Ranjan | 2020-10-27 |
| 10818502 | System and method of plasma discharge ignition to reduce surface particles | Sergey Voronin, Yusuke Yoshida, Alok Ranjan, Takashi Enomoto, Yoshio Ishikawa | 2020-10-27 |
| 10651017 | Method for operation instability detection in a surface wave plasma source | Sergey Voronin, Alok Ranjan | 2020-05-12 |
| 10083820 | Dual-frequency surface wave plasma source | Sergey Voronin, Alok Ranjan | 2018-09-25 |
| 9530626 | Method and apparatus for ESC charge control for wafer clamping | Sonam D. Sherpa, Sergey Voronin, Alok Ranjan, Yoshio Ishikawa, Takashi Enomoto | 2016-12-27 |