Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099299 | Method of patterning a substrate using a sidewall spacer etch mask | Anthony R. Schepis, Anton J. deVilliers | 2024-09-24 |
| 11990334 | Method for tuning stress transitions of films on a substrate | Daniel Fulford, Anton J. deVilliers | 2024-05-21 |
| 11841617 | Method of forming a narrow trench | Anton J. deVilliers, Daniel Fulford, Richard A. Farrell, Jeffrey Smith | 2023-12-12 |
| 11782346 | Method of patterning a substrate using a sidewall spacer etch mask | Anthony R. Schepis, Anton J. deVilliers | 2023-10-10 |
| 11682559 | Method to form narrow slot contacts | Michael Murphy, Anton J. deVilliers | 2023-06-20 |
| 11656550 | Controlling semiconductor film thickness | Daniel Fulford, Michael Murphy, Jeffrey Smith | 2023-05-23 |
| 11450562 | Method of bottom-up metallization in a recessed feature | Kai-Hung Yu, Nicholas Joy, Jeffrey Smith | 2022-09-20 |
| 11417526 | Multiple patterning processes | David L. O'Meara, Eric Chih-Fang Liu, Anton J. deVilliers, Akiteru Ko, Anthony Dip | 2022-08-16 |
| 11393694 | Method for planarization of organic films | Anton J. deVilliers, Robert Brandt, Jeffrey Smith, Daniel Fulford | 2022-07-19 |
| 11342427 | 3D directed self-assembly for nanostructures | Anton J. deVilliers, Lars Liebmann, Daniel Chanemougame | 2022-05-24 |
| 11335566 | Method for planarization of spin-on and CVD-deposited organic films | Daniel Fulford, Anton J. deVilliers | 2022-05-17 |
| 11322401 | Reverse contact and silicide process for three-dimensional semiconductor devices | Jeffrey Smith, Lars Liebmann, Daniel Chanemougame, Hiroki Niimi, Kandabara Tapily +2 more | 2022-05-03 |
| 11264274 | Reverse contact and silicide process for three-dimensional logic devices | Jeffrey Smith, Hiroaki Niimi, Daniel Chanemougame, Lars Liebmann, Kandabara Tapily +2 more | 2022-03-01 |
| 11201051 | Method for layer by layer growth of conformal films | Anton J. deVilliers, Daniel Fulford | 2021-12-14 |
| 10770479 | Three-dimensional device and method of forming the same | Jeffrey Smith, Anton J. deVilliers, Kandabara Tapily, Kai-Hung Yu | 2020-09-08 |