AS

Anthony R. Schepis

TL Tokyo Electron Limited: 14 patents #474 of 5,567Top 9%
Overall (All Time): #265,836 of 4,157,543Top 7%
17
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12394618 Method of adjusting wafer shape using multi-directional actuation films Charlotte Cutler, Michael Murphy 2025-08-19
12381093 Hybrid patterning-bonding semiconductor tool Andrew WELOTH, David Conklin, Anton J. deVilliers 2025-08-05
12381118 3D multiple location compressing bonded arm for advanced integration Andrew WELOTH, Daniel Fulford, Mark I. Gardner, H. Jim Fulford, Anton J. deVilliers +1 more 2025-08-05
12374562 Wafer shape control for W2W bonding Andrew WELOTH, David Conklin, Anton J. deVilliers 2025-07-29
12099299 Method of patterning a substrate using a sidewall spacer etch mask Jodi Grzeskowiak, Anton J. deVilliers 2024-09-24
12001147 Precision multi-axis photolithography alignment correction using stressor film Daniel Fulford, Mark I. Gardner, Anton J. deVilliers, H. Jim Fulford 2024-06-04
11862497 Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking H. Jim Fulford, Anton J. deVilliers 2024-01-02
11791167 Cyclic self-limiting etch process Hoyoung Kang 2023-10-17
11782346 Method of patterning a substrate using a sidewall spacer etch mask Jodi Grzeskowiak, Anton J. deVilliers 2023-10-10
11776808 Planarization of spin-on films Anton J. deVilliers 2023-10-03
11721551 Localized stress regions for three-dimension chiplet formation Anton J. deVilliers, Daniel Fulford, Mark I. Gardner, H. Jim Fulford 2023-08-08
11688642 Localized stress regions for three-dimension chiplet formation Anton J. deVilliers, Daniel Fulford, Mark I. Gardner, H. Jim Fulford 2023-06-27
11526088 Coaxial see-through alignment imaging system Anton J. deVilliers, David Conklin 2022-12-13
11133206 Method for die-level unique authentication and serialization of semiconductor devices using electrical and optical marking H. Jim Fulford, Anton J. deVilliers 2021-09-28
6872301 High shear rotating disc filter 2005-03-29
6663290 Grooved bearing ball and rolling element 2003-12-16
6435431 Pulverizing system purging William H. Chapman, Jr. 2002-08-20