AW

Andrew WELOTH

TL Tokyo Electron Limited: 5 patents #1,450 of 5,567Top 30%
Overall (All Time): #899,228 of 4,157,543Top 25%
5
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12381093 Hybrid patterning-bonding semiconductor tool Anthony R. Schepis, David Conklin, Anton J. deVilliers 2025-08-05
12381118 3D multiple location compressing bonded arm for advanced integration Daniel Fulford, Anthony R. Schepis, Mark I. Gardner, H. Jim Fulford, Anton J. deVilliers +1 more 2025-08-05
12374562 Wafer shape control for W2W bonding Anthony R. Schepis, David Conklin, Anton J. deVilliers 2025-07-29
12204253 In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones Michael Murphy, Daniel Fulford, Steven Gueci, David Conklin 2025-01-21
11994807 In-situ lithography pattern enhancement with localized stress treatment tuning using heat zones Michael Murphy, Daniel Fulford, Steven Gueci, David Conklin 2024-05-28