Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411412 | Patterning semiconductor features | Michael Murphy, David Conklin | 2025-09-09 |
| 12394618 | Method of adjusting wafer shape using multi-directional actuation films | Michael Murphy, Anthony R. Schepis | 2025-08-19 |
| 12282254 | Photoresist compositions and pattern formation methods | Irvinder Kaur, Ke Yang, Mingqi Li | 2025-04-22 |
| 11747733 | Freeze-less methods for self-aligned double patterning | Michael Murphy | 2023-09-05 |
| 11733609 | Silicon-containing underlayers | Li Cui, Shintaro Yamada, Paul J. LaBeaume, Suzanne M. Coley, James F. Cameron +1 more | 2023-08-22 |
| 11506979 | Method using silicon-containing underlayers | Li Cui, Paul J. LaBeaume, Suzanne M. Coley, Shintaro Yamada, James F. Cameron +1 more | 2022-11-22 |
| 11360387 | Silicon-containing underlayers | Li Cui, Paul J. LaBeaume, James F. Cameron, Shintaro Yamada, Suzanne M. Coley +1 more | 2022-06-14 |
| 10114288 | Silicon-containing underlayers | Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan, Paul J. LaBeaume, Li Cui +3 more | 2018-10-30 |
| 10031420 | Wet-strippable silicon-containing antireflectant | Owendi Ongayi, Mingqi Li, Shintaro Yamada, James F. Cameron | 2018-07-24 |
| 10007184 | Silicon-containing underlayers | Li Cui, Suzanne M. Coley, Owendi Ongayi, Christopher P. Sullivan, Paul J. LaBeaume +3 more | 2018-06-26 |
| 9442377 | Wet-strippable silicon-containing antireflectant | Owendi Ongayi, Mingqi Li, Shintaro Yamada, James F. Cameron | 2016-09-13 |
| 8778601 | Methods of forming photolithographic patterns | Seokho KANG | 2014-07-15 |