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Coating compositions and methods of forming electronic devices |
Sheng Liu, James F. Cameron, Iou-Sheng Ke, Li Cui |
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Silicon-containing underlayers |
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Method using silicon-containing underlayers |
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Silicon-containing underlayers |
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Aromatic resins for underlayers |
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Aromatic underlayer |
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Silicon-based hardmask |
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Aromatic resins for underlayers |
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Aromatic resins for underlayers |
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Silicon-based hardmask |
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Wet-strippable silicon-containing antireflectant |
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Silicon-containing underlayers |
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Aromatic resins for underlayers |
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Multiple-pattern forming methods |
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Aromatic resins for underlayers |
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2017-03-21 |
