Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12393118 | Composition for photoresist underlayer | Jung-June Lee, Jae Hwan Sim, Suwoong Kim, Jin Hong Park | 2025-08-19 |
| 10818493 | Silicon-based hardmask | Suzanne M. Coley, Paul J. LaBeaume, Shintaro Yamada, Cecilia W. Kiarie, Li Cui | 2020-10-27 |
| 10340144 | Doping of a substrate via a dopant containing polymer film | Rachel A. Segalman, Peter Trefonas, III, Andrew T. Heitsch | 2019-07-02 |
| 10186424 | Silicon-based hardmask | Suzanne M. Coley, Paul J. LaBeaume, Shintaro Yamada, Cecilia W. Kiarie, Li Cui | 2019-01-22 |
| 9576799 | Doping of a substrate via a dopant containing polymer film | Rachel A. Segalman, Peter Trefonas, III, Andrew T. Heitsch | 2017-02-21 |