Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818493 | Silicon-based hardmask | Suzanne M. Coley, Paul J. LaBeaume, Shintaro Yamada, Li Cui, Bhooshan Popere | 2020-10-27 |
| 10186424 | Silicon-based hardmask | Suzanne M. Coley, Paul J. LaBeaume, Shintaro Yamada, Li Cui, Bhooshan Popere | 2019-01-22 |
| 9366964 | Compositions and antireflective coatings for photolithography | Yuanqiao Rao, Robert L. Auger, Yasmin N. Srivastava, Christopher P. Sullivan | 2016-06-14 |
| 9011591 | Compositions and antireflective coatings for photolithography | Yuanqiao Rao, Robert L. Auger, John D. Weaver, Paul J. Popa, Roxanne M. Jenkins +4 more | 2015-04-21 |