Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733615 | Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method | Frank Staals | 2023-08-22 |
| 11586114 | Wavefront optimization for tuning scanner based on performance matching | Duan-Fu Stephen Hsu, Rafael C. Howell, Zhan Shi, Xiaoyang Li, Frank Staals | 2023-02-21 |
| 11422472 | Patterning process improvement involving optical aberration | Paulus Jacobus Maria VAN ADRICHEM, Ahmad Wasiem Ibrahim El-Said, Johannes Christiaan Maria Jasper | 2022-08-23 |
| 10394128 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Ralf Gehrke, Wolfgang Hoegele, Joerg Zimmermann | 2019-08-27 |
| 10078267 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Ralf Gehrke, Wolfgang Hoegele, Joerg Zimmermann | 2018-09-18 |
| 9955563 | EUV light source for generating a usable output beam for a projection exposure apparatus | Ingo Saenger, Manfred Maul, Johannes Ruoff, Daniel Kraehmer | 2018-04-24 |
| 9678432 | Optical assembly for increasing the etendue | Ingo Saenger | 2017-06-13 |
| 9645503 | Collector | Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Johannes Ruoff, Martin Meier +2 more | 2017-05-09 |
| 9551941 | Illumination system for an EUV lithography device and facet mirror therefor | Johannes Ruoff, Ingo Saenger, Joerg Zimmermann, Daniel Kraehmer, Frank Schlesener | 2017-01-24 |
| 9507269 | Illumination optical unit for projection lithography | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-29 |
| 9500956 | Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure | Ingo Saenger, Joerg Zimmermann, Johannes Ruoff, Martin Meier, Frank Schlesener | 2016-11-22 |
| 9405202 | Optical system of a microlithographic projection exposure apparatus | Ingo Saenger | 2016-08-02 |