Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10948637 | Metrology system having an EUV optical unit | Dirk Hellweg, Stefan Mueller | 2021-03-16 |
| 10394128 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Christoph Hennerkes, Wolfgang Hoegele, Joerg Zimmermann | 2019-08-27 |
| 10078267 | Method for predicting at least one illumination parameter for evaluating an illumination setting | Christoph Hennerkes, Wolfgang Hoegele, Joerg Zimmermann | 2018-09-18 |