Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12141507 | Process window optimizer | Stefan Hunsche | 2024-11-12 |
| 12092965 | Process variability aware adaptive inspection and metrology | Vivek Jain, Stefan Hunsche | 2024-09-17 |
| 11460784 | Method for determining candidate patterns from set of patterns of a patterning process | Mark C. Simmons | 2022-10-04 |
| 11238189 | Process window optimizer | Stefan Hunsche | 2022-02-01 |
| 11176307 | Method and system for pattern configuration | Been-Der Chen | 2021-11-16 |
| 11003093 | Process variability aware adaptive inspection and metrology | Vivek Jain, Stefan Hunsche | 2021-05-11 |
| 10514614 | Process variability aware adaptive inspection and metrology | Vivek Jain, Stefan Hunsche | 2019-12-24 |
| 9459537 | System and method to ensure source and image stability | Yu Cao, Jun Ye, Johannes Catharinus Hubertus Mulkens | 2016-10-04 |