Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9760018 | Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure | Seyed Iman Mossavat, Hugo Augustinus Joseph Cramer, Adriaan Johan Van Leest | 2017-09-12 |
| 9518936 | Method and apparatus for determining lithographic quality of a structure | Henricus Johannes Lambertus Megens, Jouke Krist, Miguel GARCIA GRANDA, Lu Xu | 2016-12-13 |
| 8868387 | Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Jouke Krist | 2014-10-21 |