Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518936 | Method and apparatus for determining lithographic quality of a structure | Willem Jan Grootjans, Henricus Johannes Lambertus Megens, Miguel GARCIA GRANDA, Lu Xu | 2016-12-13 |
| 8868387 | Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus | Arie Jeffrey Den Boef, Hugo Augustinus Joseph Cramer, Willem Jan Grootjans | 2014-10-21 |