Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alignment control in nanoimprint lithography based on real-time system identification

Alignment control in nanoimprint lithography based on real-time system identification

US Patent 10409178 · Granted Sep 10, 2019

Estimated economic value: $22,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chip chuck and a method of using the same2025
Antenna-inserted electrode structure and image display device including the same2025
Antenna package and image display device including the same2025
Devices, systems, and methods for the transformation and cropping of drop patter2025
Antenna device and display device including the same2025
Antenna package and image display device including the same2025
Antenna package and image display device including the same2025
Antenna package and image display device including the same2025
Antenna device and display device including the same2025
Apparatus including a plurality of heads and a method of using the same2025
Apparatus for cleaning mask2025
Antenna stack structure2025