Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7315347 | Exposure apparatus and device manufacturing method | — | 2008-01-01 |
| 7312848 | Positioning apparatus, exposure apparatus, and device manufacturing method | Hideo Tanaka, Yasuhito Sasaki | 2007-12-25 |
| 7307698 | Exposure apparatus and device manufacturing method | Yasuhiro Fujiwara | 2007-12-11 |
| 7301602 | Stage apparatus and exposure apparatus | Hitoshi Sato, Yasuhito Sasaki | 2007-11-27 |
| 7289194 | Positioning apparatus, exposure apparatus, and device manufacturing method | — | 2007-10-30 |
| 7253878 | Exposure apparatus and device fabrication method | — | 2007-08-07 |
| 7253877 | Exposure apparatus, and device manufacturing method | Takashi Meguro | 2007-08-07 |
| 7236230 | Exposure apparatus and device fabrication method | — | 2007-06-26 |
| 7236228 | Exposure apparatus | — | 2007-06-26 |
| 7224432 | Stage device, exposure apparatus, and device manufacturing method | Yasuhito Sasaki, Hitoshi Sato, Katsumi Asada, Hideo Tanaka | 2007-05-29 |
| 7212277 | Substrate holding technique | Hideo Tanaka | 2007-05-01 |
| 7196769 | Exposure apparatus and device manufacturing method | — | 2007-03-27 |
| 7130016 | Exposure apparatus and device manufacturing method | — | 2006-10-31 |
| 7061580 | Exposure apparatus and device fabrication method | — | 2006-06-13 |
| 7046335 | Exposure apparatus and device fabrication method | — | 2006-05-16 |
| 6836031 | Linear motor and exposure apparatus using the same | Keiji Emoto, Kazuhito Outuka | 2004-12-28 |
| 6801301 | Exposure apparatus | Hideki Nogawa | 2004-10-05 |
| 6791670 | Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Kazuhito Outuka, Keiji Emoto | 2004-09-14 |
| 6583859 | Stage device, an exposure apparatus and a device manufacturing method using the same | Tsuneo Takashima, Yukio Takabayashi | 2003-06-24 |
| 6409783 | Air cleaner system for motorcycle | Naohisa Hirao | 2002-06-25 |
| 6320649 | Stage system for exposure apparatus | Yukio Tokuda | 2001-11-20 |
| 6266133 | Stage device, an exposure apparatus and a device manufacturing method using the same | Tsuneo Takashima, Yukio Takabayashi | 2001-07-24 |
| 6262794 | Exposure apparatus and device manufacturing method | — | 2001-07-17 |
| 5604719 | Magnetooptical information recording/reproducing method and apparatus employing a floating slider supporting a magnetic head | Hiroaki Kakimoto, Nobuaki Date, Masahiko Chaya | 1997-02-18 |
| 5379283 | Magneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loading | — | 1995-01-03 |