Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6002465 | Stage device, exposure apparatus using the same, and device production method | — | 1999-12-14 |
| 5684856 | Stage device and pattern transfer system using the same | Hirohito Itoh, Shinji Ohishi, Kazunori Iwamoto, Youzou Fukagawa, Toshiya Asano +1 more | 1997-11-04 |
| 5681638 | Substrate, and method and apparatus for holding the substrate | — | 1997-10-28 |
| 5537186 | Movable stage mechanism and exposure apparatus using the same | Ryuichi Ebinuma | 1996-07-16 |
| 5467720 | Support device | Kazunori Iwamoto | 1995-11-21 |
| 5224139 | X-ray mask and semiconductor device manufacturing method using the same | Hiroshi Maehara | 1993-06-29 |
| 5050196 | Radiation gauge | Tsuneaki Kadosawa | 1991-09-17 |