Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7030964 | Stage system, exposure apparatus, and device manufacturing method | Kotaro Akutsu, Mitsuru Inoue | 2006-04-18 |
| 6987335 | Alignment apparatus and exposure apparatus using the same | — | 2006-01-17 |
| 6954041 | Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus | — | 2005-10-11 |
| 6952254 | Supporting system in exposure apparatus | — | 2005-10-04 |
| 6946757 | Stage apparatus and method of controlling the same | — | 2005-09-20 |
| 6917046 | Positioning apparatus, charged-particle-beam exposure apparatus, and device manufacturing method | — | 2005-07-12 |
| 6903468 | Moving stage device in exposure apparatus | — | 2005-06-07 |
| 6873404 | Stage apparatus and method of driving the same | — | 2005-03-29 |
| 6864602 | Linear motor, stage apparatus, and exposure apparatus | — | 2005-03-08 |
| 6859257 | Stage system | — | 2005-02-22 |
| 6791214 | Moving-magnet linear motor, aligner and apparatus provided therewith, and method for manufacturing devices using the same | — | 2004-09-14 |
| 6665053 | Supporting system in exposure apparatus | — | 2003-12-16 |
| 6570645 | Stage system and stage driving method for use in exposure apparatus | Ryuichi Ebinuma | 2003-05-27 |
| 6479991 | Stage mechanism, exposure apparatus and device manufacturing method in which a coil unit of a driving mechanism is moved substantially in synchronism with a stage | — | 2002-11-12 |
| 6426788 | Stage device and exposure apparatus using the same | — | 2002-07-30 |
| 6414742 | Stage apparatus, and exposure apparatus and device manufacturing method using the same | Shuichi Yabu | 2002-07-02 |
| 6359677 | Stage apparatus, exposure apparatus using the same, and a device manufacturing method | Hiroshi Itoh | 2002-03-19 |
| 6320645 | Stage system and exposure apparatus, and device manufacturing method using the same | Mitsuru Inoue, Yukio Tokuda | 2001-11-20 |
| 6265793 | Linear motor coil for exposure apparatus | — | 2001-07-24 |
| 6177978 | Stage device and exposure apparatus using the same | — | 2001-01-23 |
| 6172738 | Scanning exposure apparatus and device manufacturing method using the same | Mitsuru Inoue | 2001-01-09 |
| 6157159 | Stage system and exposure apparatus using the same | Shuichi Yabu | 2000-12-05 |
| 6128069 | Stage mechanism for exposure apparatus | — | 2000-10-03 |
| 6107703 | Linear motor mechanism for exposure apparatus, and device manufacturing method using the same | — | 2000-08-22 |
| 6037680 | Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus | Ryuichi Ebinuma | 2000-03-14 |