Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8501599 | Substrate processing apparatus and substrate processing method | Masakazu Shimada, Takeo Hanashima, Haruo Morikawa, Akira Hayashida | 2013-08-06 |
| 8417394 | Substrate processing apparatus, semiconductor device manufacturing method and temperature controlling method | Masashi Sugishita, Tsukasa Iida, Susumu NISHIURA, Masao Aoyama, Kenichi Fujimoto +2 more | 2013-04-09 |
| 8367975 | Temperature adjustment method | Masashi Sugishita | 2013-02-05 |
| 8158911 | Heating apparatus, substrate processing apparatus employing the same, method of manufacturing semiconductor devices, and extending member | Akira Hayashida, Masakazu Shimada, Kimio Kitamura, Kenji Tanaka, Jyunichi Nishihara | 2012-04-17 |
| 8148271 | Substrate processing apparatus, coolant gas supply nozzle and semiconductor device manufacturing method | Akira Hayashida, Masakazu Shimada, Takenori Oka | 2012-04-03 |
| 8116618 | Heating apparatus, substrate processing apparatus, and method of manufacturing semiconductor devices | Akira Hayashida, Masakazu Shimada, Masashi Sugishita, Toshimitsu Miyata, Kimio Kitamura +2 more | 2012-02-14 |
| 7930059 | Temperature regulating method, thermal processing system and semiconductor device manufacturing method | Masashi Sugishita | 2011-04-19 |
| 7727780 | Substrate processing method and semiconductor manufacturing apparatus | Masashi Sugishita, Akira Hayashida | 2010-06-01 |
| 7700054 | Substrate processing apparatus having gas side flow via gas inlet | Akira Hayashida, Masakazu Shimada, Yukinori Aburatani, Tomoyuki Yamada, Seiyo Nakashima +1 more | 2010-04-20 |
| 7577493 | Temperature regulating method, thermal processing system and semiconductor device manufacturing method | Masashi Sugishita | 2009-08-18 |
| 7346273 | Substrate processing equipment | Kazuo Tanaka, Masashi Sugishita | 2008-03-18 |
| 6767752 | Temperature control method and semiconductor device manufacturing method | Minoru Nakano | 2004-07-27 |
| 6746908 | Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device | Kazuo Tanaka, Minoru Nakano, Hideto Yamaguchi | 2004-06-08 |
| 6662353 | System and program for estimating person-hours required to prepare a pattern film of a circuit to be printed on a board | Junichi Yamamoto, Sachio Henmi, Shigemitsu Fujisawa, Masanobu Sakurai, Kazuyuki Tajima +1 more | 2003-12-09 |