Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651068 | Method of manufacturing semiconductor device by setting process chamber to maintenance enable state | Yasuhiro MIZUGUCHI, Naofumi Ohashi, Shun MATSUI | 2020-05-12 |
| 10503152 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2019-12-10 |
| 10453720 | Method of manufacturing semiconductor device | Yukinori Aburatani, Takashi Yahata, Naofumi Ohashi, Shun MATSUI, Keita ICHIMURA | 2019-10-22 |
| 10424520 | Method of manufacturing semiconductor device | Takafumi Sasaki, Kazuhiro Morimitsu, Naofumi Ohashi, Shun MATSUI | 2019-09-24 |
| 9728431 | Method of manufacturing semiconductor device | Naofumi Ohashi, Toshiyuki Kikuchi, Shun MATSUI | 2017-08-08 |
| 9659767 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Hiroshi Ashihara, Atsushi Sano | 2017-05-23 |
| 9508546 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Hiroshi Ashihara, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2016-11-29 |
| 9163309 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tetsuo Yamamoto, Kazuhiro Morimitsu, Kazuyuki Toyoda, Kenji Ono, Ikuo Hirose +1 more | 2015-10-20 |
| 9070554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Toyoda, Yukitomo HIROCHI, Tetsuo Yamamoto, Kazuhiro Morimitsu | 2015-06-30 |
| 8986450 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidehiro Yanai, Hiroshi Ashihara, Atsushi Sano | 2015-03-24 |
| 8925562 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuyuki Toyoda, Hiroshi Ashihara, Atsushi Sano, Naonori Akae, Hidehiro Yanai | 2015-01-06 |
| 8222161 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Mitsuro Tanabe, Harunobu Sakuma | 2012-07-17 |
| 7943528 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Mitsuro Tanabe, Harunobu Sakuma | 2011-05-17 |