Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi +1 more | 2018-07-24 |
| 9869022 | Substrate processing apparatus | — | 2018-01-16 |
| 9816183 | Substrate processing apparatus | Hiroshi Ashihara | 2017-11-14 |
| 6154166 | Microwave detector | Yuichi Kajita, Mitsuhiro Imura, Shinji Koike, Akira Ito, Hisao Ono | 2000-11-28 |
| 6049313 | Microwave detector | Yuichi Kajita, Tetsuya Hosoi, Takehiko Sugiura, Hisao Ono | 2000-04-11 |