Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D739832 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Shinya Morita, Kosuke Takagi, Yasuaki Komae +3 more | 2015-09-29 |
| 9028614 | Substrate processing apparatus | Daisuke Hara, Takeshi Itoh, Masanao Fukuda, Hiroaki Hiramatsu, Shuhei Saido +1 more | 2015-05-12 |
| 8882923 | Substrate processing apparatus and method of manufacturing semiconductor device | Shuhei Saido, Daisuke Hara | 2014-11-11 |
| 8771416 | Substrate processing apparatus with an insulator disposed in the reaction chamber | Shuhei Saido, Kenji Shirako | 2014-07-08 |
| 7455734 | Substrate processing apparatus, substrate holder, and manufacturing method of semiconductor device | Kazuhiro Morimitsu | 2008-11-25 |
| 6737613 | Heat treatment apparatus and method for processing substrates | Kazuhiro Morimitsu, Tatsuhisa Matsunaga | 2004-05-18 |