Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531467 | Manufacturing method of semiconductor device and substrate processing apparatus | Atsushi Sano, Sadayoshi Horii, Masayuki Asai | 2009-05-12 |
| 7524766 | Method for manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Masayuki Asai, Atsushi Sano | 2009-04-28 |
| 6682971 | Method of manufacturing a semiconductor | Masayuki Tsuneda | 2004-01-27 |
| 6576481 | Method of manufacturing semiconductor devices | Masayuki Tsuneda, Atsushi Sano, Tsukasa Ohoka | 2003-06-10 |
| 6548404 | Method and apparatus for manufacturing semiconductor devices | Masayuki Tsuneda | 2003-04-15 |
| 6306183 | Method of forming manufacturing semiconductor device | Shigeru Fujita, Makoto Furuno | 2001-10-23 |
| 6204199 | Method for producing a semiconductor device | Masanori Sakai, Masayuki Tsuneda, Naoko Matsuyama, Michihide Nakamure | 2001-03-20 |