Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8501599 | Substrate processing apparatus and substrate processing method | Masaaki Ueno, Masakazu Shimada, Haruo Morikawa, Akira Hayashida | 2013-08-06 |
| 8367530 | Substrate processing apparatus and manufacturing method of semiconductor device | Kiyohiko Maeda, Masanao Osanai | 2013-02-05 |
| 7795143 | Substrate processing apparatus and manufacturing method of semiconductor device | Kiyohiko Maeda, Masanao Osanai | 2010-09-14 |