Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12053805 | Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Kenji Kameda, Tsukasa Kamakura, Takeo Hanashima, Hiroaki Hiramatsu +5 more | 2024-08-06 |
| 11814725 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Koei KURIBAYASHI, Takeo Hanashima, Hiroyuki Miyagishi | 2023-11-14 |
| 11387097 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima | 2022-07-12 |