Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2023-07-11 |
| 11626280 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Takayuki Waseda | 2023-04-11 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Yoshitomo HASHIMOTO | 2022-08-16 |
| 11335554 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Nakagawa, Takayuki Waseda, Motomu DEGAI | 2022-05-17 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2022-04-26 |
| 11183382 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2021-11-23 |
| 11158501 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2021-10-26 |
| 11152215 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Motomu DEGAI, Hiroshi Ashihara | 2021-10-19 |
| 11094532 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Tatsuru Matsuoka, Kenji Kameda, Satoshi Shimamoto | 2021-08-17 |
| 10804100 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda, Atsushi Sano, Tatsuru Matsuoka | 2020-10-13 |
| 10720324 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroshi Ashihara, Hajime Karasawa, Kazuhiro Harada | 2020-07-21 |
| 10361084 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system | Hiroshi Ashihara, Kazuhiro Harada | 2019-07-23 |
| 10290542 | Method of manufacturing semiconductor device | — | 2019-05-14 |
| 10276393 | Method of manufacturing semiconductor device | — | 2019-04-30 |
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takuro USHIDA, Tsukasa Kamakura, Yoshiro Hirose | 2018-04-24 |
| 9916976 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takuro USHIDA, Tsukasa Kamakura, Hiroshi Ashihara | 2018-03-13 |
| 9812355 | Method of manufacturing semiconductor device | Hiroshi Ashihara | 2017-11-07 |
| 9761456 | Method of manufacturing semiconductor device and substrate processing apparatus | Kazuhiro Harada, Masahito Kitamura | 2017-09-12 |
| 9728409 | Method of manufacturing semiconductor device | Kazuhiro Harada, Hiroshi Ashihara | 2017-08-08 |
| 9558937 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kazuhiro Harada, Hiroshi Ashihara, Ryuji Yamamoto | 2017-01-31 |
| 9418855 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kazuhiro Harada, Hiroshi Ashihara | 2016-08-16 |
| 9187826 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kazuhiro Harada, Hiroshi Ashihara, Ryuji Yamamoto | 2015-11-17 |