Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10074535 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshiro Hirose | 2018-09-11 |
| 9934962 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2018-04-03 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2018-01-30 |
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Satoshi Shimamoto | 2017-12-05 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka, Katsuyoshi Harada | 2017-08-22 |
| 9704703 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-07-11 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Katsuyoshi Harada, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2017-04-11 |
| 9583338 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2017-02-28 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yugo Orihashi, Yoshiro Hirose | 2016-10-04 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Satoshi Shimamoto | 2016-10-04 |
| 9218959 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Satoshi Shimamoto, Yugo Orihashi, Yoshiro Hirose | 2015-12-22 |
| 9054046 | Method of manufacturing semiconductor device and method of processing substrate | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Satoshi Shimamoto | 2015-06-09 |
| 8785333 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Satoshi Shimamoto, Atsushi Sano | 2014-07-22 |