Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699593 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Ryota Ueno, Motomu DEGAI, Takashi Nakagawa, Yoshiro Hirose | 2023-07-11 |
| 11664217 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2023-05-30 |
| 11626280 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda | 2023-04-11 |
| 11527402 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2022-12-13 |
| 11515143 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and method of processing substrate | Tatsuru Matsuoka | 2022-11-29 |
| 11417518 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI | 2022-08-16 |
| 11315800 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda | 2022-04-26 |
| 11183382 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI | 2021-11-23 |
| 11164741 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2021-11-02 |
| 11056337 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2021-07-06 |
| 10930491 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hiroki Yamashita, Katsuyoshi Harada | 2021-02-23 |
| 10910214 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Masaya NAGATO, Tatsuru Matsuoka, Hiroki Tamashita, Takafumi Nitta +1 more | 2021-02-02 |
| 10790136 | Method of manufacturing semiconductor device, substrate processing system and non-transitory computer-readable recording medium | Tatsuru Matsuoka | 2020-09-29 |
| 10770287 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2020-09-08 |
| 10763101 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Hiroki Yamashita | 2020-09-01 |
| 10755921 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yoshiro Hirose, Tatsuru Matsuoka | 2020-08-25 |
| 10626502 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka | 2020-04-21 |
| 10600642 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose | 2020-03-24 |
| 10586698 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Yushin Takasawa, Masaya NAGATO | 2020-03-10 |
| 10497561 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2019-12-03 |
| 10229829 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2019-03-12 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Hajime Karasawa, Ryota Horiike, Naoharu Nakaiso | 2019-02-05 |
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Ryota Horiike | 2018-12-25 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Tatsuru Matsuoka, Masaya NAGATO, Ryota Horiike, Shintaro Kogura | 2018-10-09 |
| 10090149 | Method of manufacturing semiconductor device by forming and modifying film on substrate | Yoshiro Hirose | 2018-10-02 |