Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9732426 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2017-08-15 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-07-04 |
| 9685455 | Method of manufacturing semiconductor device having 3D structure | Takashi Nakagawa | 2017-06-20 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Hiroshi Ashihara, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Tsukasa Kamakura, Yoshiro Hirose | 2017-05-02 |
| 9613798 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2017-04-04 |
| 9524867 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Yoshiro Hirose | 2016-12-20 |
| 9478413 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Yoshiro Hirose, Atsushi Sano | 2016-10-25 |
| 9472391 | Semiconductor device manufacturing method | Yoshiro Hirose, Atsushi Sano, Tsukasa Kamakura, Takaaki Noda | 2016-10-18 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Yugo Orihashi, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2016-10-04 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO | 2016-10-04 |
| 9431240 | Method of manufacturing semiconductor device | Yoshiro Hirose, Atsushi Sano, Katsuyoshi Harada | 2016-08-30 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Atsuhiko Suda, Naofumi Ohashi | 2016-05-31 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Takaaki Noda, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 9218959 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Yugo Orihashi, Yoshitomo HASHIMOTO, Yoshiro Hirose | 2015-12-22 |
| 9054046 | Method of manufacturing semiconductor device and method of processing substrate | Yoshiro Hirose, Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO | 2015-06-09 |
| 8987146 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Kaori Kirikihira, Yugo Orihashi | 2015-03-24 |
| 8785333 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Yoshiro Hirose, Atsushi Sano | 2014-07-22 |
| 7022563 | Semiconductor integrated circuit device and a method of manufacturing the same | Fumio Ootsuka, Yusuke Nonaka, Sohei Omori, Hideto Kazama | 2006-04-04 |
| 6762444 | Semiconductor integrated circuit device and a method of manufacturing the same | Fumio Ootsuka, Yusuke Nonaka, Sohei Omori, Hideto Kazama | 2004-07-13 |
| 6635937 | Semiconductor integrated circuit device | Fumio Ootsuka, Yusuke Nonaka, Sohei Omori, Hideto Kazama | 2003-10-21 |
| 5981301 | Regeneration method and apparatus of wafer and substrate | Kazuo Muramatsu, Akihiro Kawai, Tsutomu Watanabe | 1999-11-09 |
| 5500170 | Heating and extruding method and device for bulk preform | Toshiaki Okumura, Takao Ekimoto, Katsumi Ogawa, Masahiro Tomita, Yoshitaka Nimura +1 more | 1996-03-19 |
| 5458838 | Heating and extruding method for bulk preform | Toshiaki Okumura, Takao Ekimoto, Katsumi Ogawa, Masahiro Tomita, Yoshitaka Nimura +1 more | 1995-10-17 |