Issued Patents All Time
Showing 26–50 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090149 | Method of manufacturing semiconductor device by forming and modifying film on substrate | Yoshitomo HASHIMOTO | 2018-10-02 |
| 10074535 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka, Yoshitomo HASHIMOTO | 2018-09-11 |
| 10066298 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2018-09-04 |
| 10032629 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Satoshi Shimamoto | 2018-07-24 |
| 10026607 | Substrate processing apparatus for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2018-07-17 |
| 9978587 | Method of manufacturing semiconductor device including forming a film containing a first element, a second element and carbon, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Ryuji Yamamoto | 2018-05-22 |
| 9966252 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2018-05-08 |
| 9966251 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2018-05-08 |
| 9953830 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Takuro USHIDA, Tsukasa Kamakura, Kimihiko NAKATANI | 2018-04-24 |
| 9934962 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2018-04-03 |
| 9890458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2018-02-13 |
| 9881789 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2018-01-30 |
| 9865451 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA | 2018-01-09 |
| 9865458 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2018-01-09 |
| 9837261 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2017-12-05 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9816181 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2017-11-14 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Kiyohiko Maeda | 2017-10-17 |
| 9773661 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takafumi Nitta, Satoshi Shimamoto | 2017-09-26 |
| 9761437 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | Yosuke Ota | 2017-09-12 |
| 9741556 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2017-08-22 |
| 9741555 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Katsuyoshi Harada | 2017-08-22 |
| 9732426 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Atsushi Sano | 2017-08-15 |
| 9735006 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2017-08-15 |
| 9711348 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2017-07-18 |