Issued Patents All Time
Showing 51–75 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9704703 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Atsushi Sano | 2017-07-11 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Kiyohiko Maeda | 2017-07-04 |
| 9691606 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshinobu Nakamura, Ryota Sasajima | 2017-06-27 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Takaaki Noda, Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima +1 more | 2017-06-06 |
| 9640387 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Tsukasa Kamakura, Satoshi Shimamoto | 2017-05-02 |
| 9620357 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Shingo NOHARA, Ryota Sasajima, Katsuyoshi Harada, Yuji Urano | 2017-04-11 |
| 9613798 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2017-04-04 |
| 9607827 | Method of manufacturing semiconductor device, and recording medium | Atsushi Sano, Katsuyoshi Harada | 2017-03-28 |
| 9583338 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka | 2017-02-28 |
| 9548198 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Shingo Okubo | 2017-01-17 |
| 9524867 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Satoshi Shimamoto | 2016-12-20 |
| 9520282 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2016-12-13 |
| 9508543 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Yugo Orihashi | 2016-11-29 |
| 9487861 | Substrate processing apparatus capable of forming films including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-11-08 |
| 9478417 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-10-25 |
| 9478413 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Atsushi Sano | 2016-10-25 |
| 9472397 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Katsuyoshi Harada | 2016-10-18 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Atsushi Sano, Tsukasa Kamakura, Takaaki Noda | 2016-10-18 |
| 9460916 | Method of manufacturing semiconductor device and substrate processing apparatus | Satoshi Shimamoto, Yugo Orihashi, Yoshitomo HASHIMOTO | 2016-10-04 |
| 9460914 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Katsuyoshi Harada, Atsushi Sano | 2016-10-04 |
| 9460911 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2016-10-04 |
| 9455137 | Method of manufacturing semiconductor device | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2016-09-27 |
| 9449813 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano, Tsukasa Kamakura | 2016-09-20 |
| 9443720 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-09-13 |
| 9443718 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Katsuyoshi Harada, Atsushi Sano | 2016-09-13 |