Issued Patents All Time
Showing 101–125 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9312123 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Hajime Karasawa | 2016-04-12 |
| 9281181 | Film forming method and recording medium for performing the method | Atsushi Sano | 2016-03-08 |
| 9269566 | Substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota | 2016-02-23 |
| 9257275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano | 2016-02-09 |
| 9245745 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2016-01-26 |
| 9234277 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryuji Yamamoto, Atsushi Sano | 2016-01-12 |
| 9218959 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Satoshi Shimamoto, Yugo Orihashi, Yoshitomo HASHIMOTO | 2015-12-22 |
| 9217199 | Substrate processing apparatus | Kenji Kanayama, Norikazu Mizuno, Yushin Takasawa, Yosuke Ota | 2015-12-22 |
| 9196476 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2015-11-24 |
| 9196473 | Method of manufacturing an oxynitride film for a semiconductor device | Yosuke Ota, Naonori Akae, Yushin Takasawa | 2015-11-24 |
| 9190298 | Film forming method and recording medium for performing the method | Katsuyoshi Harada, Tsukasa Kamakura, Atsushi Sano, Yugo Orihashi | 2015-11-17 |
| 9177786 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Atsushi Sano, Kiyohiko Maeda, Kazuyuki Okuda, Ryuji Yamamoto | 2015-11-03 |
| 9165761 | Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium | Ryuji Yamamoto | 2015-10-20 |
| 9136114 | Method of manufacturing semiconductor device, substrate processing method, computer-readable medium with program for executing a substrate processing method, and substrate processing apparatus | Ryota Sasajima, Yoshinobu Nakamura, Yushin Takasawa | 2015-09-15 |
| 9123530 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | Yosuke Ota | 2015-09-01 |
| 9096928 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Naonori Akae, Osamu Kasahara | 2015-08-04 |
| 9093270 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kenichi Suzaki | 2015-07-28 |
| 9054046 | Method of manufacturing semiconductor device and method of processing substrate | Atsushi Sano, Yugo Orihashi, Yoshitomo HASHIMOTO, Satoshi Shimamoto | 2015-06-09 |
| 9053927 | Method of manufacturing semiconductor device and method of processing substrate | Atsushi Sano | 2015-06-09 |
| 9039838 | Method of manufacturing semiconductor device and substrate processing apparatus | Ryota Sasajima, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2015-05-26 |
| 9018104 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Kenji Kanayama, Norikazu Mizuno, Yushin Takasawa, Yosuke Ota | 2015-04-28 |
| 9011601 | Substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota | 2015-04-21 |
| 8946092 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2015-02-03 |
| 8901014 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus and non-transitory computer readable recording medium | Yosuke Ota, Naonori Akae, Ryota Sasajima | 2014-12-02 |
| 8895455 | Method for manufacturing semiconductor device and substrate processing apparatus | Naonori Akae | 2014-11-25 |