Issued Patents All Time
Showing 126–148 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8895457 | Method of manufacturing semiconductor device and substrate processing apparatus | Naonori Akae, Kotaro Murakami, Kenji Kameda | 2014-11-25 |
| 8815751 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano, Kazutaka Yanagita, Katsuko Higashino | 2014-08-26 |
| 8809204 | Method of manufacturing semiconductor device and substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota | 2014-08-19 |
| 8785333 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Satoshi Shimamoto, Atsushi Sano | 2014-07-22 |
| 8673790 | Method of manufacturing a semiconductor device, method of cleaning a process vessel, and substrate processing apparatus | Naonori Akae, Kotaro Murakami | 2014-03-18 |
| 8609551 | Method for manufacturing semiconductor device and substrate processing apparatus | Naonori Akae | 2013-12-17 |
| 8575042 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yosuke Ota, Atsushi Sano, Osamu Kasahara, Kazuyuki Okuda, Kiyohiko Maeda | 2013-11-05 |
| 8546272 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2013-10-01 |
| 8535479 | Manufacturing method of semiconductor device, and semiconductor device | Norikazu Mizuno, Kenji Kanayama, Kazuyuki Okuda, Masayuki Asai | 2013-09-17 |
| 8524580 | Manufacturing method of semiconductor substrate and substrate processing apparatus | Naonori Akae, Tomohide Kato | 2013-09-03 |
| 8415258 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota, Ryota Sasajima | 2013-04-09 |
| 8409988 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Hajime Karasawa | 2013-04-02 |
| 8410003 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yosuke Ota, Naonari Akae, Yushin Takasawa | 2013-04-02 |
| 8410001 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yushin Takasawa, Tsukasa Kamakura, Yukinao KAGA | 2013-04-02 |
| 8367557 | Method of forming an insulation film having low impurity concentrations | Naonori Akae, Yushin Takasawa, Yosuke Ota | 2013-02-05 |
| 8252701 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Ryota Sasajima, Yosuke Ota, Naonori Akae, Kojiro Yokozawa | 2012-08-28 |
| 8202809 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yosuke Ota, Naonori Akae, Yushin Takasawa | 2012-06-19 |
| 8093159 | Manufacturing method of semiconductor device, and semiconductor device | Norikazu Mizuno, Kenji Kanayama, Kazuyuki Okuda, Masayuki Asai | 2012-01-10 |
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yushin Takasawa, Yosuke Ota, Ryota Sasajima | 2011-12-13 |
| 7884034 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Tomohide Kato, Nanori Akae | 2011-02-08 |
| 6450932 | Spare tool changing system for machining center | Tetsuya Yamada | 2002-09-17 |
| 6120223 | Cover device for machine tool | Akitoshi Sato | 2000-09-19 |
| 4975328 | Process for producing polyurethane lens | Takeshi Sakamoto, Masahisa Kosaka, Mitsuo Sugimura, Kazuo Inoue, Eiichi Yajima +1 more | 1990-12-04 |