Issued Patents All Time
Showing 76–100 of 148 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9443719 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-09-13 |
| 9437422 | Method of manufacturing semiconductor device and substrate processing method | Atsushi Sano | 2016-09-06 |
| 9431240 | Method of manufacturing semiconductor device | Atsushi Sano, Katsuyoshi Harada, Satoshi Shimamoto | 2016-08-30 |
| 9425075 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Atsushi Sano, Naonori Akae | 2016-08-23 |
| 9412584 | Method of manufacturing a thin film having a high tolerance to etching and non-transitory computer-readable recording medium | Atsushi Sano | 2016-08-09 |
| 9396929 | Method of manufacturing a semiconductor device, substrate processing apparatus and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Katsuko Higashino | 2016-07-19 |
| 9390911 | Method of manufacturing semiconductor device | Ryota Sasajima, Yoshinobu Nakamura, Ryuji Yamamoto | 2016-07-12 |
| 9390916 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Kenichi Suzaki | 2016-07-12 |
| 9384961 | Method for manufacturing semiconductor device, method for processing substrate, substrate processing apparatus and recording medium | Ryuji Yamamoto | 2016-07-05 |
| 9384966 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384967 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384968 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384969 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384970 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384971 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9384972 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9385013 | Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Hajime Karasawa | 2016-07-05 |
| 9378943 | Method of manufacturing semiconductor device, method of processing substrate substrate processing apparatus and non-transitory computer-readable recording medium | Yushin Takasawa, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2016-06-28 |
| 9349587 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Atsushi Sano, Kazuyuki Okuda, Kiyohiko Maeda | 2016-05-24 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takaaki Noda, Takeo Hanashima, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 9343290 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Norikazu Mizuno, Kazutaka Yanagita, Shingo Okubo | 2016-05-17 |
| 9334567 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Kenji Kanayama, Norikazu Mizuno, Yushin Takasawa, Yosuke Ota | 2016-05-10 |
| 9330904 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Hajime Karasawa | 2016-05-03 |
| 9330903 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Atsushi Sano | 2016-05-03 |
| 9318316 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements | Yushin Takasawa, Hajime Karasawa | 2016-04-19 |