Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Naoto NODA, Jean-Marc Girard | 2022-10-25 |
| 9633838 | Vapor deposition of silicon-containing films using penta-substituted disilanes | Jean-Marc Girard, Changhee Ko, Kazutaka Yanagita, Shingo Okubo, Naoto NODA +1 more | 2017-04-25 |