Issued Patents All Time
Showing 26–50 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852187 | Method and apparatus for separating member | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2005-02-08 |
| 6833312 | Plate member separating apparatus and method | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2004-12-21 |
| 6825099 | Method and apparatus for separating member | Mitsuharu Kohda, Kiyofumi Sakaguchi, Akira Fujimoto | 2004-11-30 |
| 6773534 | Sample processing apparatus and method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2004-08-10 |
| 6767840 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method | Fumio Uehara, Kiyofumi Sakaguchi, Masakazu Harada | 2004-07-27 |
| 6746559 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi | 2004-06-08 |
| 6712288 | Method and apparatus for separating sample | Kiyofumi Sakaguchi | 2004-03-30 |
| 6672358 | Sample processing system | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2004-01-06 |
| 6653206 | Method and apparatus for processing composite member | Kazuaki Ohmi, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2003-11-25 |
| 6653205 | Composite member separating method, thin film manufacturing method, and composite member separating apparatus | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-11-25 |
| 6629539 | Sample processing system | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-10-07 |
| 6624047 | Substrate and method of manufacturing the same | Kiyofumi Sakaguchi, Kazuaki Ohmi | 2003-09-23 |
| 6609446 | Separating apparatus, separating method, and method of manufacturing semiconductor substrate | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2003-08-26 |
| 6609553 | Sample processing apparatus and method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2003-08-26 |
| 6605518 | Method of separating composite member and process for producing thin film | Kazuaki Ohmi, Katsumi Nakagawa, Nobuhiko Sato, Kiyofumi Sakaguchi, Takao Yonehara | 2003-08-12 |
| 6597039 | Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-07-22 |
| 6540861 | Member separating apparatus and processing apparatus | Kiyofumi Sakaguchi, Takao Yonehara, Kazuaki Omi, Toshikazu Miyakogawa | 2003-04-01 |
| 6527031 | Sample separating apparatus and method, and substrate manufacturing method | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2003-03-04 |
| 6521078 | Sample separating apparatus and method, and substrate manufacturing method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2003-02-18 |
| 6475323 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-11-05 |
| 6436226 | Object separating apparatus and method, and method of manufacturing semiconductor substrate | Kazuaki Omi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-08-20 |
| 6427747 | Apparatus and method of separating sample and substrate fabrication method | Kazuaki Omi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-08-06 |
| 6427748 | Sample processing apparatus and method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-08-06 |
| 6426270 | Substrate processing method and method of manufacturing semiconductor substrate | Kiyofumi Sakaguchi, Kazuaki Ohmi | 2002-07-30 |
| 6418999 | Sample separating apparatus and method, and substrate manufacturing method | Takao Yonehara, Kazuaki Omi, Kiyofumi Sakaguchi | 2002-07-16 |