Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767840 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method | Kiyofumi Sakaguchi, Kazutaka Yanagita, Masakazu Harada | 2004-07-27 |
| 6199563 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method | Kiyofumi Sakaguchi, Kazutaka Yanagita, Masakazu Harada | 2001-03-13 |