Issued Patents All Time
Showing 51–58 of 58 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391743 | Method and apparatus for producing photoelectric conversion device | Masaaki Iwane, Takao Yonehara, Kazuaki Ohmi, Shoji Nishida, Kiyofumi Sakaguchi | 2002-05-21 |
| 6391067 | Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus | Kiyofumi Sakaguchi | 2002-05-21 |
| 6382292 | Method and apparatus for separating composite member using fluid | Kazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi | 2002-05-07 |
| 6380099 | Porous region removing method and semiconductor substrate manufacturing method | Kiyofumi Sakaguchi | 2002-04-30 |
| 6376332 | Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method | Kazuaki Ohmi, Kiyofumi Sakaguchi, Hirokazu Kurisu | 2002-04-23 |
| 6342433 | Composite member its separation method and preparation method of semiconductor substrate by utilization thereof | Kazuaki Ohmi, Kiyofumi Sakaguchi | 2002-01-29 |
| 6199563 | Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method | Fumio Uehara, Kiyofumi Sakaguchi, Masakazu Harada | 2001-03-13 |
| 6127281 | Porous region removing method and semiconductor substrate manufacturing method | Kiyofumi Sakaguchi | 2000-10-03 |