Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9062996 | Device for supplying the liquid material inside a filling container and method of controlling the liquid level inside the filling container for said liquid material supply device | Toshiyuki Nakagawa, Takamitsu Shigemoto, Yoshio Uetake, Masahiro Kimoto, Tetsuro Shigeno +1 more | 2015-06-23 |
| 8365779 | Liquid quantity measuring apparatus, liquid quantity measuring method and method for supplying quantitively supplying liquid material | Toshiyuki Nakagawa, Masaaki Muro, Tetsuro Shigeno | 2013-02-05 |
| 8348248 | Bubbling supply system for stable precursor supply | Yoichi Sakata, Kazutaka Yanagita, Toshiyuki Nakagawa | 2013-01-08 |
| 7334708 | Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical | Mindi Xu, Tay Sayasane, Joseph E. Paganessi, Gregory M. Jursich, Yukinobu Nishikawa +3 more | 2008-02-26 |