Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906094 | Method for producing a high purity trisilane product from the pyrolysis of disilane | Cyril Bourasseau, Mindi Xu, John Borzio, Donald Mitchell, Derong Zhou +1 more | 2011-03-15 |
| 7334708 | Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical | Mindi Xu, Tay Sayasane, Joseph E. Paganessi, Naoyuki Nakamoto, Yukinobu Nishikawa +3 more | 2008-02-26 |
| 7312165 | Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices | Ronald S. Inman | 2007-12-25 |
| 7175696 | Method and apparatus for corrosive gas purification | Derong Zhou, John Borzio, Earle Kebbekus | 2007-02-13 |
| 7141500 | Methods for forming aluminum containing films utilizing amino aluminum precursors | Ronald S. Inman | 2006-11-28 |
| 6581649 | Methods and apparatus for delivering high purity liquids with low vapor pressure | — | 2003-06-24 |
| 6543493 | Optical monitoring processes and apparatus for combined liquid level sensing and quality control | Kevin Sirk | 2003-04-08 |
| 6361750 | Systems for purification of boron trichloride | Derong Zhou, Earle Kebbekus, John Borzio, Jason Uner | 2002-03-26 |
| 6238636 | Process and systems for purification of boron trichloride | Derong Zhou, Earle Kebbekus, John Borzio, Jason Uner | 2001-05-29 |
| 5897847 | Method for extending the gas lifetime of excimer lasers | William A. Von Drasek | 1999-04-27 |
| 5672827 | Method for measuring the flow rate of a species contained in an exhaust gas stream of a combustion process | — | 1997-09-30 |
| 5063035 | Enhanced performance of alumina for the removal of low-level fluorine from gas streams | Paul Leondaridis, William A. Von Drasek | 1991-11-05 |