Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8191397 | Methods for checking and calibrating concentration sensors in a semiconductor processing chamber | Francois Doniat, Nathan Stafford, Axel Soulet, Jean-Louis Marc | 2012-06-05 |
| 7312165 | Codeposition of hafnium-germanium oxides on substrates used in or for semiconductor devices | Gregory M. Jursich | 2007-12-25 |
| 7141500 | Methods for forming aluminum containing films utilizing amino aluminum precursors | Gregory M. Jursich | 2006-11-28 |
| 6421127 | Method and system for preventing deposition on an optical component in a spectroscopic sensor | James McAndrew, Benjamin Jurcik, Carol Schnepper, Dmitry Znamensky, Tracey Jacksier | 2002-07-16 |
| 6188475 | In-line cell for absorption spectroscopy | James McAndrew | 2001-02-13 |
| 6084668 | In-line cell for absorption spectroscopy | James McAndrew | 2000-07-04 |
| 5949537 | In-line cell for absorption spectroscopy | James McAndrew | 1999-09-07 |
| 5880850 | Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy | James McAndrew | 1999-03-09 |
| 5835230 | Method for calibration of a spectroscopic sensor | James McAndrew | 1998-11-10 |
| 5818578 | Polygonal planar multipass cell, system and apparatus including same, and method of use | James McAndrew | 1998-10-06 |
| 5742399 | Method for stabilizing the wavelength in a laser spectrometer system | James McAndrew | 1998-04-21 |
| 5351120 | Spectroscopic cell design | Benjamin Jurcik, Michael D. Brandt, James McAndrew | 1994-09-27 |