Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11280491 | Furnace with integrated heat recovery utilizing radiative recuperator for preheating combustion reactants using heat from flue gas | Taekyu Kang, Remi Tsiava, Jiefu Ma, Ryan B. Adelman, Henri Chevrel | 2022-03-22 |
| 10465904 | Furnace with integrated heat recovery utilizing radiative recuperator for preheating combustion reactants using heat from flue gas | Taekyu Kang, Remi Tsiava, Jiefu Ma, Ryan B. Adelman, Henri Chevrel | 2019-11-05 |
| 9851102 | Method and system for heat recovery from products of combustion and charge heating installation including the same | Taekyu Kang, Youssef Joumani, Remi Tsiava | 2017-12-26 |
| 9618203 | Method and system for heat recovery from products of combustion and charge heating installation including the same | Taekyu Kang, Youssef Joumani, Remi Tsiava | 2017-04-11 |
| 8999734 | Cyclic amino compounds for low-k silylation | Curtis Anderson, Christian Dussarrat | 2015-04-07 |
| 8932674 | Vapor deposition methods of SiCOH low-k films | Christian Dussarrat, Francois Doniat, Curtis Anderson | 2015-01-13 |
| 8298965 | Volatile precursors for deposition of C-linked SiCOH dielectrics | Francois Doniat | 2012-10-30 |
| 6885452 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Hwa-Chi Wang, Benjamin Jurcik | 2005-04-26 |
| 6499502 | Method and device for filling a distribution line with corrosive gas | Jean-Marc Girard, Eric Duchateau, Bertrand Lefevre | 2002-12-31 |
| 6493086 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Hwa-Chi Wang, Benjamin Jurcik | 2002-12-10 |
| 6442736 | Semiconductor processing system and method for controlling moisture level therein | Jean-Marc Girard, Benjamin Jurcik, Jean-Michel Friedt | 2002-08-27 |
| 6421127 | Method and system for preventing deposition on an optical component in a spectroscopic sensor | Benjamin Jurcik, Carol Schnepper, Ronald S. Inman, Dmitry Znamensky, Tracey Jacksier | 2002-07-16 |
| 6341521 | Process and device for measuring the amount of impurities in a gas sample to be analyzed | Mélanie Bartolomey, Jean-Marc Girard, Patrick Mauvais | 2002-01-29 |
| 6188475 | In-line cell for absorption spectroscopy | Ronald S. Inman | 2001-02-13 |
| 6154284 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Hwa-Chi Wang, Benjamin Jurcik | 2000-11-28 |
| 6084668 | In-line cell for absorption spectroscopy | Ronald S. Inman | 2000-07-04 |
| 5991696 | Method for intelligent data acquisition in a measurement system | — | 1999-11-23 |
| 5963336 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Hwa-Chi Wang, Benjamin Jurcik | 1999-10-05 |
| 5949537 | In-line cell for absorption spectroscopy | Ronald S. Inman | 1999-09-07 |
| 5880850 | Method and system for sensitive detection of molecular species in a vacuum by harmonic detection spectroscopy | Ronald S. Inman | 1999-03-09 |
| 5835230 | Method for calibration of a spectroscopic sensor | Ronald S. Inman | 1998-11-10 |
| 5818578 | Polygonal planar multipass cell, system and apparatus including same, and method of use | Ronald S. Inman | 1998-10-06 |
| 5742399 | Method for stabilizing the wavelength in a laser spectrometer system | Ronald S. Inman | 1998-04-21 |
| 5714678 | Method for rapidly determining an impurity level in a gas source or a gas distribution system | Benjamin Jurcik, Dmitry Znamensky | 1998-02-03 |
| 5351120 | Spectroscopic cell design | Benjamin Jurcik, Michael D. Brandt, Ronald S. Inman | 1994-09-27 |