Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8932674 | Vapor deposition methods of SiCOH low-k films | Christian Dussarrat, Curtis Anderson, James McAndrew | 2015-01-13 |
| 8298965 | Volatile precursors for deposition of C-linked SiCOH dielectrics | James McAndrew | 2012-10-30 |
| 8191397 | Methods for checking and calibrating concentration sensors in a semiconductor processing chamber | Ronald S. Inman, Nathan Stafford, Axel Soulet, Jean-Louis Marc | 2012-06-05 |