Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8702297 | Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system | Karl J. Urquhart, Georges Guarneri, Norbert Fanjat, Laurent Langellier, Christophe Colin | 2014-04-22 |
| 8317388 | Systems for managing fluids in a processing environment using a liquid ring pump and reclamation system | Karl J. Urquhart, Georges Guarneri, Norbert Fanjat, Laurent Langellier, Christophe Colin | 2012-11-27 |
| 8191397 | Methods for checking and calibrating concentration sensors in a semiconductor processing chamber | Francois Doniat, Ronald S. Inman, Nathan Stafford, Axel Soulet | 2012-06-05 |
| 7980753 | Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system | Karl J. Urquhart, Georges Guarneri, Norbert Fanjat, Laurent Langellier, Christophe Colin | 2011-07-19 |
| 7871249 | Systems and methods for managing fluids using a liquid ring pump | Karl J. Urquhart, Georges Guarneri, Norbert Fanjat, Laurent Langellier, Christophe Colin | 2011-01-18 |